Zhu and 772002 are both good at math. One day, Zhu wants to test the ability of 772002, so he asks 772002 to solve a math problem.
But 772002 has a appointment with his girl friend. So 772002 gives this problem to you.
There are $n$ numbers $a_1, a_2, ..., a_n$. The value of the prime factors of each number does not exceed $2000$, you can choose at least one number and multiply them, then you can get a number $b$.
How many different ways of choices can make $b$ is a perfect square number. The answer maybe too large, so you should output the answer modulo by $1000000007$.